%0 Journal Article %T Electroluminescent Materials with Feature Sizes as Small as 5 μm Using Elastomeric Membranes as Masks for Dry Lift‐Off %A Duffy, David C. %A Jackman, Rebecca J. %A Vaeth, Kathleen M. %A Jensen, Klavs F. %A Whitesides, George M. %J Advanced Materials %V 11 %N 7 %P 546-552 %@ 0935-9648 %D 1999-05-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve