%0 Journal Article
%T Imprinting of double-sided microstructures with rapid induction heating and gas-assisted pressuring
%A Shih, Yang-Min
%A Kao, Ching-Chieh
%A Ke, Kun-Cheng
%A Yang, Sen-Yeu
%J Journal of Micromechanics and Microengineering
%V 27
%N 9
%P 11
%@ 0960-1317
%D 2017-09-01
%~ DeepDyve