%0 Journal Article
%T COPs/particles discrimination using an automated surface inspection tool
%A Lorenzi, Gabriele
%A Nguyen, Kim Hung
%A Sanna, Cristina
%J Proceedings of SPIE
%V 5041
%N 1
%P 39-49
%@ 0277-786X
%D 2003-07-15
%I SPIE
%~ DeepDyve