%0 Journal Article
%T Photoresists for microlithography
%A Roy, Debmalya
%A Basu, P. K.
%A Eswaran, S. V.
%J Resonance
%V 7
%N 7
%P 44-53
%@ 0971-8044
%D 2002-07-01
%I Springer India
%~ DeepDyve