%0 Journal Article
%T Process liability evaluation for EUVL
%A Aoyama, Hajime
%A Nakajima, Yumi
%A Mori, Ichiro
%J Proceedings of SPIE
%V 7271
%N 1
%P 727120-727120-12
%@ 0277-786X
%D 2009-03-13
%I SPIE
%~ DeepDyve