%0 Journal Article %T Influence of oblique‐angle sputtered transparent conducting oxides on performance of Si‐based thin film solar cells %A Leem, Jung Woo %A Yu, Jae Su %J Physica Status Solidi (A) Applications and Materials Science %V 208 %N 9 %P 2220-2225 %@ 1862-6300 %D 2011-09-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve