%0 Journal Article
%T Effects of substrate temperature on structural and electrical properties of cubic silicon carbide films deposited by hot wire chemical vapor deposition technique
%A Jha, Himanshu
%A Agarwal, Pratima
%J Journal of Materials Science: Materials in Electronics
%V 26
%N 5
%P 2844-2850
%@ 0957-4522
%D 2015-01-31
%I Springer US
%~ DeepDyve