%0 Journal Article
%T Evaluation of image distortion in SEM by using a dot-array–based certified reference material
%A Kumagai, Kazuhiro
%A Kurokawa, Akira
%J Microscopy
%V Advance Article
%P 1-1
%@ 0022-0744
%D 2021-01-16
%I The Japanese Society of Microscopy
%~ DeepDyve