%0 Journal Article
%T Microfabricated interlock system for precision alignment
%A Sabeti, Roya
%A Holl, Mark R.
%J Proceedings of SPIE
%V 2978
%N 1
%P 180-185
%@ 0277-786X
%D 1997-03-31
%I SPIE
%~ DeepDyve