%0 Journal Article
%T Progress on EUV pellicle development
%A Zoldesi, Carmen
%A Bal, Kursat
%A Blum, Brian
%A Bock, Guus
%A Brouns, Derk
%A Dhalluin, Florian
%A Dziomkina, Nina
%A Espinoza, Juan Diego Arias
%A de Hoogh, Joost
%A Houweling, Silvester
%A Jansen, Maarten
%A Kamali, Mohammad
%A Kempa, Alain
%A Kox, Ronald
%A de Kruif, Robert
%A Lima, Jorge
%A Liu, Yang
%A Meijer, Henk
%A Meiling, Hans
%A van Mil, Ijen
%A Reijnen, Marco
%A Scaccabarozzi, Luigi
%A Smith, Daniel
%A Verbrugge, Beatrijs
%A de Winters, Laurens
%A Xiong, Xugang
%A Zimmerman, John
%J Proceedings of SPIE
%V 9048
%P 90481N-90481N-10
%@ 0277-786X
%D 2014-04-17
%I SPIE
%~ DeepDyve