%0 Journal Article %T Progress on EUV pellicle development %A Zoldesi, Carmen %A Bal, Kursat %A Blum, Brian %A Bock, Guus %A Brouns, Derk %A Dhalluin, Florian %A Dziomkina, Nina %A Espinoza, Juan Diego Arias %A de Hoogh, Joost %A Houweling, Silvester %A Jansen, Maarten %A Kamali, Mohammad %A Kempa, Alain %A Kox, Ronald %A de Kruif, Robert %A Lima, Jorge %A Liu, Yang %A Meijer, Henk %A Meiling, Hans %A van Mil, Ijen %A Reijnen, Marco %A Scaccabarozzi, Luigi %A Smith, Daniel %A Verbrugge, Beatrijs %A de Winters, Laurens %A Xiong, Xugang %A Zimmerman, John %J Proceedings of SPIE %V 9048 %P 90481N-90481N-10 %@ 0277-786X %D 2014-04-17 %I SPIE %~ DeepDyve