%0 Journal Article %T Sequence-defined polypeptoids facilitating stochastics control and EUV patterning study %A Yuan, Chenyun %A Marui, Rika %A Adams, Cameron P. %A Segalman, Rachel A. %A Ober, Christopher K. %J Proceedings of SPIE %V 13428 %P 134281K-134281K-4 %@ 0277-786X %D 2025-04-22 %I SPIE %~ DeepDyve