%0 Journal Article
%T Three-dimensional measurement of multilayer thin films based on scanning white light interferometer
%A Shi, Zhendong
%A Zhang, Lin
%A Ren, Huan
%A Yuan, Quan
%A Yang, Yi
%A Ma, Hua
%J Proceedings of SPIE
%V 9684
%P 96841R-96841R-6
%@ 0277-786X
%D 2016-09-26
%I SPIE
%~ DeepDyve