%0 Journal Article
%T Properties of Ru Thin Films Fabricated on TiN by Metal-Organic Chemical Vapor Deposition
%A Sun, Ho-Jung
%A Kim, Younsoo
%A Song, Han-Sang
%A Lee, Jong-Min
%A Roh, Jae-Sung
%A Sohn, Hyun-chul
%J Japanese Journal of Applied Physics
%V 43
%N 4R
%@ 0021-4922
%D 2004-04-01
%~ DeepDyve