%0 Journal Article %T A measurement and separation method for perpendicular errors of rotary axes %A Zhou, Qing %A Zhou, Panyu %A Xu, Min %A Kong, Lingbao %J Proceedings of SPIE %V 10847 %P 108470F-108470F-5 %@ 0277-786X %D 2018-12-12 %I SPIE %~ DeepDyve