%0 Journal Article
%T A stack fusion model for material removal rate prediction in chemical-mechanical planarization process
%A Zhao, Shuai
%A Huang, Yixiang
%J The International Journal of Advanced Manufacturing Technology
%V 99
%N 12
%P 2407-2416
%@ 0268-3768
%D 2018-09-03
%I Springer London
%~ DeepDyve