%0 Journal Article
%T Deep proton writing: a powerful rapid prototyping technology for various micro-optical components
%A Van Erps, Jürgen
%J Proceedings of SPIE
%V 7716
%N 1
%P 77160W-77160W-11
%@ 0277-786X
%D 2010-05-06
%I SPIE
%~ DeepDyve