%0 Journal Article %T Forming microstructures of certain transparency on thin titanium films by laser thermochemical method %A Nguyen, Q.D. %A Shakhno, E.A. %A Sinev, D.A. %A Zakoldaev, R.A. %A Veiko, V.P. %J Journal of Physics: Conference Series %V 1822 %N 1 %P 7 %@ 1742-6588 %D 2021-02-26 %~ DeepDyve