%0 Journal Article
%T Extending optical lithography with immersion
%A Streefkerk, Bob
%A Flagello, Donis G.
%A Graupner, Paul
%J Proceedings of SPIE
%V 5377
%N 1
%P 285-305
%@ 0277-786X
%D 2004-05-28
%I SPIE
%~ DeepDyve