%0 Journal Article
%T Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures
%A Kostmann, Cris
%A Lisec, Thomas
%A Bodduluri, Mani  Teja
%A Andersen, Olaf
%J Micromachines
%V 12
%N 10
%@ 2072-666X
%D 2021-09-29
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve