%0 Journal Article %T Feasibility study of self-assembly mechanism for variable optical attenuator %A Lee, Chengkuo %A Lai, Yen-Jyh %A Wu, Chia-Yu %A Yeh, J Andrew %A Huang, Ruey-Shing %J Journal of Micromechanics and Microengineering %V 15 %N 1 %@ 0960-1317 %D 2005-01-01 %~ DeepDyve