%0 Journal Article %T Optimization of Gate-All-Around Device to Achieve High Performance and Low Power with Low Substrate Leakage %A Yoo, Changhyun %A Chang, Jeesoo %A Park, Sugil %A Kim, Hyungyeong %A Jeon, Jongwook %J Nanomaterials %V 12 %N 4 %@ 2079-4991 %D 2022-02-09 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve