%0 Journal Article
%T Shoulder fillet effects in strength distributions of microelectromechanical system components
%A DelRio, Frank W
%A Boyce, Brad L
%A Benzing, Jake T
%A Friedman, Lawrence H
%A Cook, Robert F
%J Journal of Micromechanics and Microengineering
%V 30
%N 12
%P 11
%@ 0960-1317
%D 2020-11-07
%~ DeepDyve