%0 Journal Article
%T Grey forecasting run-to-run control system in copper chemical mechanical polishing
%A Wang, Gou-Jen
%A Wang, Ming-Tzong
%A Yang, Feng-Cheng
%A Huang, Min-Liang
%A Loh, Kou-Ning
%A Chen, Jacob
%J The International Journal of Advanced Manufacturing Technology
%V 41
%N 2
%P 48-56
%@ 0268-3768
%D 2008-06-18
%I Springer-Verlag
%~ DeepDyve