%0 Journal Article %T Comparative analysis of contact resistance of carbon nanotubes field-effect transistors %A Yang, Heda %A Li, Hao %A Yang, Leijing %J Proceedings of SPIE %V 11606 %P 116060Y-116060Y-4 %@ 0277-786X %D 2020-12-08 %I SPIE %~ DeepDyve