%0 Journal Article
%T Refractive index properties of SiN thin films and fabrication of SiN optical waveguide
%A Kim, D.
%A Yoon, S.
%A Jang, G.
%A Suh, S.
%A Kim, H.
%A Yoon, D.
%J Journal of Electroceramics
%V 17
%N 4
%P 315-318
%@ 1385-3449
%D 2006-01-01
%I Kluwer Academic Publishers
%~ DeepDyve