%0 Journal Article
%T Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development
%A Yun, Hyeok
%A An, Chang-Hyeon
%A Jang, Hyundong
%A Cho, Kyeongrae
%A Lee, Jeong-Sik
%A Eom, Seungjoon
%A Kim, Choong-Ki
%A Yoo, Min-Soo
%A Choi, Hyun-Chul
%A Baek, Rock-Hyun
%J Advanced Intelligent Systems
%V 5
%N 9
%D 2023-09-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve