%0 Journal Article
%T Imaging and Characteristics of a Bimaterial Microcantilever FPA Fabricated using Bulk Silicon Processes
%A Zhao, An-Di
%A Zheng, Yong-Jun
%A Yu, Xiao-Mei
%J Chinese Physics Letters
%V 29
%N 5
%P 4
%@ 0256-307X
%D 2012-05-01
%~ DeepDyve