%0 Journal Article
%T Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement
%A Weng, Weihao
%A Tan, Haiyan
%A Katnani, Ahmad
%A ,
%J Microscopy and Microanalysis
%@ 1431-9276
%D 2017-07-01
%I Cambridge University Press (CUP)
%~ DeepDyve