%0 Journal Article %T Study on an evaluation method of micro CMM spherical stylus tips by ยต-EDM on-machine measurement %A Sheu, Dong-Yea %J Journal of Micromechanics and Microengineering %V 20 %N 7 %P 5 %@ 0960-1317 %D 2010-07-01 %~ DeepDyve