%0 Journal Article
%T Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
%A Satoh, Daisuke
%A Tanaka, Shuji
%A Esashi, Masayoshi
%J IEEJ Transactions on Electrical and Electronic Engineering
%V 3
%N 3
%P 305-312
%@ 1931-4973
%D 2008-01-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve