%0 Journal Article
%T Recent development of micropore optics using MEMS technologies
%A Ezoe, Yuichiro
%A Ishisaki, Yoshitaka
%A Yang, Zhen
%A Takano, Takayuki
%J Proceedings of SPIE
%V 6266
%N 1
%P 62661B-62661B-9
%@ 0277-786X
%D 2006-06-14
%I SPIE
%~ DeepDyve