%0 Journal Article
%T Hybrid laser 3D microprocessing in glass/polymer micromechanical sensor: towards chemical sensing applications
%A Tičkūnas, Titas
%A Malinauskas, Mangirdas
%A Gadonas, Roaldas
%A Bellouard, Yves
%A Paipulas, Domas
%J Proceedings of SPIE
%V 10675
%P 106750C-106750C-7
%@ 0277-786X
%D 2018-05-22
%I SPIE
%~ DeepDyve