%0 Journal Article
%T Aqueous Developable, Negative Working Resist Made Of Chlorinated Novolac Resin
%A Hiraoka, H.
%A Patlach, A.
%A Chiong, Kaolin N.
%A Seligson, Daniel
%A Pianetta, Piero
%J Proceedings of SPIE
%V 92
%P 128-133
%@ 0277-786X
%D 1988-01-01
%I SPIE
%~ DeepDyve