%0 Journal Article
%T A hypothesis verification method using a regression tree for semiconductor yield analysis
%A Tsuda, Hidetaka
%A Shirai, Hidehiro
%A Terabe, Masahiro
%A Hashimoto, Kazuo
%A Shinohara, Ayumi
%J Electrical Engineering in Japan
%V 183
%N 3
%P 26-36
%@ 0424-7760
%D 2013-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve