%0 Journal Article
%T Modification Pathways for Copoly(2‐oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography
%A Fimberger, Martin
%A Behrendt, Andreas
%A Jakopic, Georg
%A Stelzer, Franz
%A Kumbaraci, Volkan
%A Wiesbrock, Frank
%J Macromolecular Rapid Communications
%V 37
%N 3
%P 233-238
%@ 1022-1336
%D 2016-02-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve