%0 Journal Article
%T Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond
%A Liu, Chi-Chun
%A Franke, Elliott
%A Mignot, Yann
%A Xie, Ruilong
%A Yeung, Chun
%A Zhang, Jingyun
%A Chi, Cheng
%A Zhang, Chen
%A Farrell, Richard
%A Lai, Kafai
%A Tsai, Hsinyu
%A Felix, Nelson
%A Corliss, Daniel
%J Nature Electronics
%V 1
%N 10
%P 562-569
%D 2018-10-12
%I Nature Publishing Group UK
%~ DeepDyve