%0 Journal Article
%T A MEMS Variable Optical Attenuator with Ultra-Low Wavelength-Dependent Loss and Polarization-Dependent Loss
%A Sun, Huangqingbo
%A Zhou, Wei
%A Zhang, Zijing
%A Wan, Zhujun
%J Micromachines
%V 9
%N 12
%@ 2072-666X
%D 2018-11-29
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve