%0 Journal Article
%T Defect reduction progress in step and flash imprint lithography
%A Selenidis, K.
%A Sreenivasan, S. V.
%J Proceedings of SPIE
%V 6730
%N 1
%P 67300F-67300F-12
%@ 0277-786X
%D 2007-10-05
%I SPIE
%~ DeepDyve