%0 Journal Article
%T Modeling accuracy and TAT improvements for next generation mask error correction
%A Zepka, Alex
%A Latinwo, Folarin
%A Chen, Ryan
%A Chen, Jack
%J Proceedings of SPIE
%V 12495
%P 124950Q-124950Q-5
%@ 0277-786X
%D 2023-04-28
%I SPIE
%~ DeepDyve