%0 Journal Article
%T Method of estimation of scanning system quality
%A Larkin, Eugene
%A Kotov, Vladislav
%A Kotova, Natalya
%A Privalov, Alexander
%J Proceedings of SPIE
%V 10696
%P 106962N-106962N-9
%@ 0277-786X
%D 2018-04-13
%I SPIE
%~ DeepDyve