%0 Journal Article
%T Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections
%A Ji, Meilin
%A Yang, Haolin
%A Zhou, Yongxin
%A Xiu, Xueying
%A Lv, Haochen
%A Zhang, Songsong
%J Micromachines
%V 13
%N 12
%@ 2072-666X
%D 2022-12-19
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve