%0 Journal Article %T Noise spectroscopy as a method of monitoring the quality of developed semiconductor devices %A Miroshnikova, I. %A Astakhov, V. %A Zenova, E. %A Tagachenkov, A. %A Rachnikov, D. %J Measurement Techniques %V 54 %N 6 %P 712-715 %@ 0543-1972 %D 2011-10-12 %I Springer US %~ DeepDyve