%0 Journal Article
%T Noise spectroscopy as a method of monitoring the quality of developed semiconductor devices
%A Miroshnikova, I.
%A Astakhov, V.
%A Zenova, E.
%A Tagachenkov, A.
%A Rachnikov, D.
%J Measurement Techniques
%V 54
%N 6
%P 712-715
%@ 0543-1972
%D 2011-10-12
%I Springer US
%~ DeepDyve