%0 Journal Article
%T The Effect of Interfacial Layers on High-Performance Gate Dielectrics Processed by RTP-ALD
%A Fakhruddin, Mohammed
%A Singh, Rajendra
%A Poole, Kelvin F.
%A Kondapi, Sriram V.
%A Narayan, Jagdish
%J Journal of the Electrochemical Society
%V 151
%N 8
%P G507-G511
%@ 0013-4651
%D 2004-07-19
%~ DeepDyve