%0 Journal Article %T Modelling of micropumps using unimorph piezoelectric actuator and ball valves %A Accoto, D %A Carrozza, M C %A Dario, P %J Journal of Micromechanics and Microengineering %V 10 %N 2 %@ 0960-1317 %D 2000-06-01 %~ DeepDyve