%0 Journal Article
%T Thermal oxidation of silicon studied by high resolution Rutherford backscattering
%A Grant, W.
%A Christodoulides, C.
%A Pogarides, D.
%A Williams, J.
%J Journal of Radioanalytical and Nuclear Chemistry
%V 48
%N 2
%P 277-286
%@ 0236-5731
%D 2006-10-18
%I Kluwer Academic Publishers
%~ DeepDyve