%0 Journal Article
%T Integrated packaging of 2D MOEMS mirrors with optical position feedback
%A Baumgart, M.
%A Lenzhofer, M.
%A Kremer, M. P.
%A Tortschanoff, A.
%J Proceedings of SPIE
%V 9375
%P 93750R-93750R-7
%@ 0277-786X
%D 2015-02-27
%I SPIE
%~ DeepDyve