%0 Journal Article
%T Design and fabrication of soft x-ray photolithography experimental beam line at Beijing National Synchrotron Radiation Laboratory
%A Zhou, Changxin
%J Proceedings of SPIE
%V 1465
%N 1
%P 26-33
%@ 0277-786X
%D 1991-08-01
%I SPIE
%~ DeepDyve