%0 Journal Article
%T Optimization of the In Situ Biasing FIB Sample Preparation for Hafnia-Based Ferroelectric Capacitor
%A Zhong, Qilan
%A Wang, Yiwei
%A Cheng, Yan
%A Gao, Zhaomeng
%A Zheng, Yunzhe
%A Xin, Tianjiao
%A Zheng, Yonghui
%A Huang, Rong
%A Lyu, Hangbing
%J Micromachines
%V 12
%N 12
%@ 2072-666X
%D 2021-11-24
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve