%0 Journal Article
%T Blossom overlay metrology implementation
%A Ausschnitt, C. P.
%A Binns, L. A.
%J Proceedings of SPIE
%V 6518
%N 1
%P 65180G-65180G-6
%@ 0277-786X
%D 2007-03-16
%I SPIE
%~ DeepDyve