%0 Journal Article
%T Advanced microlithography process with chemical shrink technology
%A Kanda, Takashi
%A Watase, Natsuo
%A Ishibashi, Takeo
%A Tanaka, Mikihiro
%J Proceedings of SPIE
%V 3999
%N 1
%P 881-889
%@ 0277-786X
%D 2000-06-23
%I SPIE
%~ DeepDyve